Microengraving of a potassium dihydrogen phosphate crystal by laser ablation technique

被引：0
|
作者：
Moagar-Poladian, G [1 ]
Ulieru, D [1 ]
Sandu, C [1 ]
Bulinski, M [1 ]
Dinescu, A [1 ]
Danila, M [1 ]
Gavrila, R [1 ]
机构：
[1] Natl Inst Res & Dev Microtechnol Bucharest, Bucharest 72996, Romania
来源：
MEMS, MOEMS, AND MICROMACHINING | 2004年 / 5455卷
关键词：
KDP crystal; laser micro-engraving; integrated optics; electro-optic modulators;
D O I：
10.1117/12.544992
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We present proof-of-principle results regarding the possibility of micro-engraving Potassium Dihydrogen Phosphate (KDP) crystals using laser ablation techniques. The results of the work show that this technique can be used for realizing integrated optics and micro-optics components that are based on such crystals, one of the envisaged directions being that of integrated electro-optical modulators.
引用
收藏
页码：375 / 380
页数：6
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