Development of an ultara-precise positioning stage travelling on a grating

被引：0
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作者：
Honda, S [1 ]
机构：
[1] Tokyo Metropolitan Inst Technol, Tokyo, Japan
来源：
PROCEEDINGS OF THE FIFTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 2000年
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：373 / 376
页数：4
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