Development of Dip-Pen Nanolithography (DPN) and Its Derivatives

被引:93
|
作者
Liu, Guoqiang [1 ]
Hirtz, Michael [2 ,3 ]
Fuchs, Harald [2 ,3 ,4 ,5 ]
Zheng, Zijian [1 ]
机构
[1] Hong Kong Polytech Univ, Lab Adv Interfacial Mat & Devices, Inst Text & Clothing, Hung Hom,Kowloon, Hong Kong 999077, Peoples R China
[2] Karlsruhe Inst Technol, Inst Nanotechnol INT, Hermann von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany
[3] Karlsruhe Inst Technol, KNMF, Hermann von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany
[4] Univ Munster, Phys Inst, D-48149 Munster, Germany
[5] Univ Munster, Ctr Nanotechnol CeNTech, D-48149 Munster, Germany
关键词
dip-pen nanolithography; nanofabrication; nanopatterning; polymer pen lithography; scanning probe lithography; ATOMIC-FORCE MICROSCOPE; POLYMER NANOSTRUCTURES; OXIDE NANOSTRUCTURES; CONTROLLED GROWTH; CENTIMETER-SCALE; FEATURE SIZE; SUB-100; NM; LITHOGRAPHY; TIP; NANOFABRICATION;
D O I
10.1002/smll.201900564
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Dip-pen nanolithography (DPN) is a unique nanofabrication tool that can directly write a variety of molecular patterns on a surface with high resolution and excellent registration. Over the past 20 years, DPN has experienced a tremendous evolution in terms of applicable inks, a remarkable improvement in fabrication throughput, and the development of various derivative technologies. Among these developments, polymer pen lithography (PPL) is the most prominent one that provides a large-scale, high-throughput, low-cost tool for nanofabrication, which significantly extends DPN and beyond. These developments not only expand the scope of the wide field of scanning probe lithography, but also enable DPN and PPL as general approaches for the fabrication or study of nanostructures and nanomaterials. In this review, a focused summary and historical perspective of the technological development of DPN and its derivatives, with a focus on PPL, in one timeline, are provided and future opportunities for technological exploration in this field are proposed.
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页数:9
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