共 50 条
- [11] Refractive and diffractive elements for micro-optical systems [J]. MICROELECTRONIC STRUCTURES AND MEMS FOR OPTICAL PROCESSING III, 1997, 3226 : 32 - 43
- [12] Simple technique for replication of micro-optical elements [J]. OPTICAL ENGINEERING, 1998, 37 (06) : 1804 - 1808
- [13] MEMS actuators for silicon micro-optical elements [J]. MOEMS AND MINIATURIZED SYSTEMS, 2000, 4178 : 256 - 269
- [14] Design of the new type integrated-optical elements for E-field sensor [J]. NAMES 2007: 3RD FRANCE-RUSSIA SEMINAR, PROCEEDINGS, 2008, : 67 - +
- [15] Tunable protein harmonic diffractive micro-optical elements [J]. OPTICS LETTERS, 2012, 37 (14) : 2973 - 2975
- [16] Fabrication technologies for micro-optical elements with arbitrary surfaces [J]. MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS, 2000, 4179 : 65 - 72
- [18] Monolithic integration of functional structures into micro-optical elements [J]. LASER FOCUS WORLD, 2024, 60 (01): : 46 - +