Simulation of dc atmospheric pressure argon micro glow-discharge

被引:99
|
作者
Farouk, Tanvir [1 ]
Farouk, Bakhtier [1 ]
Staack, David [1 ]
Gutsol, Alexander [1 ]
Fridman, Alexander [1 ]
机构
[1] Drexel Univ, Dept Mech Engn & Mech, Philadelphia, PA 19104 USA
来源
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2006年 / 15卷 / 04期
关键词
D O I
10.1088/0963-0252/15/4/012
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A hybrid model was used to simulate a dc argon micro glow-discharge at atmospheric pressure. The simulations were carried out for a pin-plate electrode configuration with inter-electrode gap spacing of 200 mu m together with an external circuit. The predicted voltage-current characteristics and current density profiles identify the discharge to be a normal glow-discharge. The neutral gas temperature predictions indicate that the discharge forms a non-thermal, non-equilibrium plasma. Experimental studies were conducted to validate the numerical model. Predictions from the numerical model compare favourably with the experimental measurements.
引用
收藏
页码:676 / 688
页数:13
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