Towards automated micromachining of PMMA micro channels using CO2 laser and sacrificial mask process

被引：0
|
作者：
Shi, GY [1 ]
Huang, Q [1 ]
Li, WJ [1 ]
Huang, WQ [1 ]
Shi, GC [1 ]
Li, KJ [1 ]
机构：
[1] Beijing Inst Technol, Dept Mechantron Engn, Beijing 100081, Peoples R China
来源：
2004 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1- 5, PROCEEDINGS | 2004年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A novel system for 3D microchannel fabrication based on CO2 laser-micromachining is presented. The system consists of a CO2 laser focusing system and a 3D precision positioning platform. The CO2 laser focusing system can regulate a laser beam which is of appropriate energy level and of micron dimension in beam diameter. The fabrication of 3D microchannel system in PWAA (polymethyl methacrylate) can be realized by controlling the CO2 laser and a 3-axis platform with micron-resolution movement. A special,sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently.
引用
收藏
页码：57 / 62
页数：6
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