Study on micro-machining using optical radiation pressure

被引：0
|
作者：
Shimizu, H [1 ]
Miyoshi, T [1 ]
Takaya, Y [1 ]
Takahashi, S [1 ]
机构：
[1] Osaka Univ, Dept Mech & Syst Engn, Suita, Osaka, Japan
来源：
PRECISION ENGINEERING, NANOTECHNOLOGY, VOL 1, PROCEEDINGS | 1999年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：199 / 202
页数：4
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