Combined fabrication process for high-precision aspheric surface based on smoothing polishing and magnetorheological finishing

Due to the different curvature everywhere, the aspheric surface is hard to achieve high-precision accuracy by the traditional polishing process. Controlling of the mid-spatial frequency errors (MSFR), in particular, is almost unapproachable. In this paper, the combined fabrication process based on the smoothing polishing (SP) and magnetorheological finishing (MRF) is proposed. The pressure distribution of the rigid polishing lap and semi-flexible polishing lap is calculated. The shape preserving capacity and smoothing effect are compared. The feasibility of smoothing aspheric surface with the semi-flexible polishing lap is verified, and the key technologies in the SP process are discussed. Then, A K4 parabolic surface with the diameter of 500mm is fabricated based on the combined fabrication process. A Phi 150 mm semi-flexible lap is used in the SP process to control the MSFR, and the deterministic MRF process is applied to figure the surface error. The root mean square (RMS) error of the aspheric surface converges from 0.083 lambda (lambda=632.8 nm) to 0.008 lambda. The power spectral density (PSD) result shows that the MSFR are well restrained while the surface error has a great convergence.