Focused MeV ion beams for materials analysis and microfabrication

被引：0
|
作者：
Breese, MBH [1 ]
机构：
[1] Univ Surrey, Dept Phys, Guildford GU2 5XH, Surrey, England
来源：
MRS BULLETIN | 2000年 / 25卷 / 02期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：11 / 12
页数：2
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