Digital photonic production of 3D micro fluidics in glass by high speed micro scanner

被引：1

作者：

Gottmann, Jens ^{[1
,2
]}

Hermans, Martin ^{[1
,2
]}

Ortmann, Juergen ^{[1
,2
]}

机构：

[1] Rhein Westfal TH Aachen, Lehrstuhl Lasertech, Steinbachstr 15, D-52074 Aachen, Germany

[2] LightFab Course Inc, D-52074 Aachen, Germany

来源：

PROGRESS IN ULTRAFAST LASER MODIFICATIONS OF MATERIALS | 2013年 / 8卷

关键词：

LASER; FABRICATION; MICROSTRUCTURES; SAPPHIRE;

D O I：

10.1051/matecconf/20130805003

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Digital photonic production of 3D microfluidic devices and assembled micro mechanics inside fused silica glass is carried out using In-volume Selective Laser-induced Etching (ISLE). From CAD data of digital 3D objects the trajectories of the laser focus are automatically generated. The CAM software has been developed controlling different fs-and ps-lasers, the beam deflection systems and the translation stages to produce the structures automatically.

引用

页数：2

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