Quantitative determination of compositional profiles using HAADF image simulations

被引:1
|
作者
El Bouayadi, R. [2 ]
Korytov, M. [3 ]
van Aken, P. A. [4 ]
Vennegues, P. [5 ]
Benaissa, M. [1 ]
机构
[1] CNRST, Angle Allal Fassi FAR, Rabat 10102, Morocco
[2] Univ Mohammed Premier, LPMR, Oujda 60000, Morocco
[3] Leibniz Inst Kristallzuchtung, D-12489 Berlin, Germany
[4] Max Planck Inst Intelligent Syst, D-70569 Stuttgart, Germany
[5] CNRS, CRHEA, F-06560 Valbonne, France
关键词
HAADF simulation; GaN quantum dot; AlGaN barrier; chemical quantification; MULTISLICE METHOD; ELECTRONS; CRYSTALS;
D O I
10.1002/pssc.201300305
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The purpose of this study is to use high-angle annular-dark-field simulation to quantify aluminum fluctuation across the interface formed by a GaN-quantum dot and an AlGaN barrier layer. For this aim, a basic methodology with theoretical/numerical simulations has been carried out using nanometric, but not atomic, resolution range. A simple multislice method, based on simulations of the HAADF intensity scattered by a GaN/AlGaN interface was performed. Enrichment of aluminum near the GaN/AlGaN interface was confirmed by HAADF simulation. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:284 / 288
页数:5
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