Design and fabrication of a novel integrated shadow mask for passive matrix OLDE devices

被引：4

作者：

Huang, Z. H. ^{[1
]}

Qi, G. J. ^{[1
]}

Zeng, X. T. ^{[1
]}

Lukito, D. ^{[1
]}

Su, W. M. ^{[1
]}

机构：

[1] Singapore Inst Mfg Technol, Singapore 638075, Singapore

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 17期

关键词：

Photolithography; Sol-gel; Integrated shadow mask; OLEDs; INSULATORS; DISPLAY; STACK;

D O I：

10.1016/j.tsf.2009.03.096

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper reports a novel structural design of integrated shadow mask and its fabrication technique by thin film processes. The proposed Gamma-shaped mask structure provides passive matrix OLED devices with a higher aperture ratio than the conventional T-shaped profiled masks. The Gamma-shaped mask structure can be realized with a low cost patternable sol-gel and photolithography processes. Full angle deposition can be realized with the new mask structure, which is important for mass production of devices with automatic systems. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：5280 / 5283

页数：4

共 50 条

[31] Extension of the epitaxial shadow mask MBE technique for the monolithic integration and in situ fabrication of novel device structures
Hilburger, U
Fix, W
Mayer, R
Geisselbrecht, W
Malzer, S
Velling, P
Prost, W
Tegude, FJ
Döhler, GH
[J]. JOURNAL OF CRYSTAL GROWTH, 1999, 201 : 574 - 577
[32] Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices
Wijngaards, DDL
Kong, SH
Bartek, M
Wolffenbuttel, RF
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2000, 85 (1-3) : 316 - 323
[33] Integrated optic devices using liquid crystals: design and fabrication issues
d'Alessandro, A
Asquini, R
Bellini, RP
Donisi, D
Beccherelli, R
[J]. LIQUID CRYSTALS VIII, 2004, 5518 : 123 - 135
[34] A novel design of data driver for passive matrix OLED displays
Fan, Minghao
Chen, Zhiliang
[J]. 2007 INTERNATIONAL WORKSHOP ON ELECTRON DEVICES AND SEMICONDUCTOR TECHNOLOGY, 2007, : 156 - +
[35] Design and fabrication of a ligase detection reaction (LDR) microchip with an integrated passive micromixer
Lee, Tae Yoon
Nikitopoulos, Dimistris E.
Park, Daniel S.
Soper, Steven A.
Murphy, Michael C.
[J]. INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION 2007, VOL 11 PT A AND PT B: MICRO AND NANO SYSTEMS, 2008, : 125 - 130
[36] Improved simulation model of novel Varistor plus Inductor integrated passive devices
Maric, V
Stojanovic, G
Desnica, V
Zivanocv, L
[J]. Eurocon 2005: The International Conference on Computer as a Tool, Vol 1 and 2 , Proceedings, 2005, : 1691 - 1694
[37] Silicon shadow mask fabrication for patterned metal deposition with microscale dimensions using a novel corner compensation scheme
Apanius, Matt
Kaul, Pankaj B.
Abramson, Alexis R.
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2007, 140 (02) : 168 - 175
[38] Design and Fabrication of Geometrically Complicated Multiband Microwave Devices Using A Novel Integrated 3D Printing Technique
Ahmadloo, Majid
[J]. 2013 IEEE 22ND CONFERENCE ON ELECTRICAL PERFORMANCE OF ELECTRONIC PACKAGING AND SYSTEMS (EPEPS), 2013, : 29 - 32
[39] A Compact Design and Fabrication of Optical Force Sensors Based on Integrated GaN Devices
Luo, Yumeng
Lu, Gaofei
Yin, Jiahao
Li, Kwai Hei
[J]. 2022 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE, ACP, 2022, : 2009 - 2012
[40] Design, Simulation and Fabrication of Liquid Cooled LTCC Devices Utilizing Integrated Channels
Welker, Tilo
Mueller, Jens
[J]. 2016 15TH IEEE INTERSOCIETY CONFERENCE ON THERMAL AND THERMOMECHANICAL PHENOMENA IN ELECTRONIC SYSTEMS (ITHERM), 2016, : 830 - 835

← 1 2 3 4 5 →