Silicon resonator sensor systems using self-mixing interferometry

被引：8

作者：

Hauptmann, MA ^{[1
]}

Grattan, KTV ^{[1
]}

Palmer, AW ^{[1
]}

Fritsch, H ^{[1
]}

Lucklum, R ^{[1
]}

Hauptmann, PR ^{[1
]}

机构：

[1] OTTO VON GUERICKE UNIV,INST PROZESSMESSTECH & ELEKT,FAK ELEKTROTECH,D-39106 MAGDEBURG,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 55卷 / 2-3期

关键词：

optical-fibre interferometry; silicon resonator systems;

D O I：

10.1016/S0924-4247(97)80059-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The characteristics of silicon resonator systems for sensing, widely used in a range of miniature devices, and interrogated by a novel optical-fibre interferometer based on the self-mixing interference effect that was observed by reflecting light from the resonator back into a laser cavity, have been investigated. The silicon devices at the heart of the system are excited acoustically and their resonance behaviour is measured optically in this system. The principle of the interferometric technique, in the experimental arrangement used, and the results of the investigations carried out on the system are discussed.

引用

页码：71 / 77

页数：7

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