Influence of substrate thickness on the responsivity of antenna-coupled THz microbolometers

被引：0
|
作者：
Tu, X. C. [1 ]
Xiao, P. [1 ]
Jiang, C. T. [1 ]
Wan, C. [1 ]
Jia, X. Q. [1 ]
Kang, L. [1 ]
Chen, J. [1 ]
Wu, P. H. [1 ]
机构：
[1] Nanjing Univ, Res Inst Superconductor Elect, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China
来源：
2016 41ST INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ) | 2016年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the influence of substrate thickness on the performance of antenna coupled microbolometers for terahertz (THz) detection. Planar antennas with Nb5N6 microbolometers were fabricated on silicon substrates. Detected voltages of these antenna-coupled microbolometers are altered with a periodic variation from 0.5 THz to 0.75 THz, which is accorded with the reflection of the substrate. By placing a piece of movable metallic slab behind the device, which results in a tunable thickness of the substrate, we can improve the voltage responsivity of the device at a given frequency.
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