Polycrystalline silicon films on ceramic substrates by aluminium-induced crystallisation process

被引：0

作者：

Pihan, E ^{[1
]}

Slaoui, A ^{[1
]}

Focsa, A ^{[1
]}

Cabarrocas, PRI ^{[1
]}

机构：

[1] CNRS, Lab PHASE, F-67037 Strasbourg 2, France

来源：

PROCEEDINGS OF 3RD WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION, VOLS A-C | 2003年

关键词：

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Growth of polycrystalline silicon layers on ceramic substrates using the aluminium. induced crystallisation (AIC) process of amorphous silicon is presented. Alumina and mullite ceramics were used as substrates as well as thermally-oxidized silicon for comparison. We have found a faster layer exchange process and therefore smaller grains in the final continuous poly-Si seed film on mullite and alumina. Raman spectroscopy confirmed the high crystalline quality of this AIC layer. Silicon epitaxy on the AIC seed layers by high temperature CVD is also reported, thanks to the ceramic substrate.

引用

页码：1182 / 1185

页数：4

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