Fabrication of PZT multilayer actuator by a two-step sintering process

Lead zirconate titanate (PZT) multilayer devices have been fabricated by a two-step sintering process. The multilayer structure was first sintered at 1280 degreesC for 5 min., then it was cooled to 1150 degreesC and kept for 1.5 h. The sintered PZT multilayer device was studied by scanning electron microscopy and X-ray diffraction. There was little inter-diffusion between the PZT layer and the palladium-silver (Pd/Ag) electrodes and the electrodes have a high conductivity after sintering. The PZT multilayer device has good ferroelectric properties as confirmed by hysteresis loop measurements. This two-step process avoids the sintering of the PZT device at 1280degreesC for a prolong period of time, and thus allows the use of Pd/Ag interleaving electrodes instead of platinum (Pt) electrodes, thereby reducing the manufacturing cost.