Effect of Al2O3/Al bilayer protective coatings on the high-temperature stability of PdCr thin film strain gages

被引：33

作者：

Yang, Shenyong ^{[1
]}

Li, Hongfang ^{[1
]}

Lin, Xingkai ^{[1
]}

Yao, Jinyuan ^{[1
]}

Yang, Zhouqing ^{[1
]}

Zhang, Congchun ^{[1
]}

Wang, Hong ^{[1
]}

Ding, Guifu ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Natl Key Lab Sci & Technol Micro Nano Fabricat, 800 Dongchuan Rd, Shanghai 200240, Peoples R China

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2018年 / 759卷

关键词：

High-temperature alloys; Thin films; Oxidation; SEM; Strain; TEXTURE FORMATION; TIN; OXIDATION; ALLOY; GAS;

D O I：

10.1016/j.jallcom.2018.05.146

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

PdCr thin film strain gages with Al2O3/Al bilayer protective coatings were fabricated onto alumina substrates by utilizing MEMS technology. It was found that PdCr thin film strain gages with Al2O3/Al bilayer coatings exhibited the smallest TCR of +150 ppm/degrees C, the smallest drift rate less than 0.0004/h, and the largest gage factor of 1.7, compared to as-deposited and Al2O3 overcoated PdCr thin film strain gages. This marked improvement in the piezoresistive response and stability can be attributed to the excellent structure stability and the oxidation resistance provided by in-situ formed Al2O3 interlayer combined with sputtered Al2O3 overcoat. (C) 2018 Elsevier B.V. All rights reserved.

引用

页码：1 / 7

页数：7

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