Comparison of ZnO/64° LiNbO3 and ZnO/36° LiTaO3 surface acoustic wave devices for sensing application

被引：8
|
作者：
Kalantar-Zadeh, K. [1 ]
Powell, D. A.
Sadek, A. Z.
Wlodarski, W.
Yang, Q. B.
Li, Y. X.
机构：
[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic, Australia
[2] Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
来源：
SENSOR LETTERS | 2006年 / 4卷 / 02期
关键词：
64 degrees LiNbO3; 36 degrees LiTaO3; ZnO; layered SAW; mass sensing;
D O I：
10.1166/sl.2006.015
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The performance of ZnO/64 degrees-YX LiNbO3 and ZnO/36 degrees-YX LiTaO3 layered SAW structures was compared in terms of mass sensitivity and acoustic wave velocity. It was found that the ZnO/64 degrees LiNbO3 structure has a few distinct advantages over ZnO/36 degrees LiTaO3. For ZnO/64 degrees LiNbO3, the mass sensitivity is similar to 2.5 times larger. Additionally, the optimum thickness of the ZnO guiding layer is approximately half that of the ZnO/36 degrees LiTaO3 structure, which reduces the cost of fabrication.
引用
收藏
页码：135 / 138
页数：4
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