Nanocrystal size distribution analysis from transmission electron microscopy images

被引:7
|
作者
van Sebille, Martijn [1 ]
van der Maaten, Laurens J. P. [2 ]
Xie, Ling [3 ]
Jarolimek, Karol [1 ]
Santbergen, Rudi [1 ]
van Swaaij, Rene A. C. M. M. [1 ]
Leifer, Klaus [3 ]
Zeman, Miro [1 ]
机构
[1] Delft Univ Technol, Photovolta Mat & Devices, NL-2628 CD Delft, Netherlands
[2] Delft Univ Technol, Pattern Recognit Lab, NL-2628 CD Delft, Netherlands
[3] Uppsala Univ, Appl Mat Sci, S-75237 Uppsala, Sweden
关键词
TEM;
D O I
10.1039/c5nr06292f
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We propose a method, with minimal bias caused by user input, to quickly detect and measure the nanocrystal size distribution from transmission electron microscopy (TEM) images using a combination of Laplacian of Gaussian filters and non-maximum suppression. We demonstrate the proposed method on bright-field TEM images of an a-SiC:H sample containing embedded silicon nanocrystals with varying magnifications and we compare the accuracy and speed with size distributions obtained by manual measurements, a thresholding method and PEBBLES. Finally, we analytically consider the error induced by slicing nanocrystals during TEM sample preparation on the measured nanocrystal size distribution and formulate an equation to correct this effect.
引用
收藏
页码:20593 / 20606
页数:14
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