Conical tungsten stamps for the replication of pore arrays in anodic aluminium oxide films

被引：5

作者：

LeClere, D. J. ^{[1
]}

Thompson, G. E. ^{[1
]}

Derby, B. ^{[2
]}

机构：

[1] Univ Manchester, Ctr Corros & Protect, Manchester M60 1QD, Lancs, England

[2] Univ Manchester, Manchester Mat Sci Ctr, Manchester M1 7HS, Lancs, England

来源：

NANOTECHNOLOGY | 2009年 / 20卷 / 24期

基金：

英国工程与自然科学研究理事会;

关键词：

POROUS ALUMINA; NANODOT ARRAY; FABRICATION;

D O I：

10.1088/0957-4484/20/24/245304

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A tungsten master stamp has been generated by applying a novel procedure that includes two-step anodizing, followed by sequential anodizing and pore widening to develop nominally funnelled pores. These conical-shaped pores were filled with tungsten by sputter coating to manufacture a master stamp. Under a pressure of 65 MPa, the master stamp successfully embossed the surface of annealed and electropolished aluminium. The embossed surface was then used to control the position of pores created by anodizing under the conditions used to produce the original pore array.

引用

页数：6

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