Image Processing in the Material Science or Fractal Behaviour on the GaAs/Electrolyte Interface

被引：0
|
作者：
Nemcsics, Akos [1 ,2 ]
Schuszter, Miklos [3 ]
Dobos, Laszlo [2 ]
Turmezei, Peter [1 ]
机构：
[1] Budapest Tech, Inst Microelect & Technol, Tavaszmezo 17, H-1084 Budapest, Hungary
[2] Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary
[3] Tech Univ Budapest, Dept Elect Technol, H-1521 Budapest, Hungary
来源：
2008 6TH INTERNATIONAL SYMPOSIUM ON INTELLIGENT SYSTEMS AND INFORMATICS | 2008年
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D O I：
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中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
Here, pattern formation on GaAs (001) surface after electrochemical layer removal with the help of image processing was investigated. The morphology of GaAs surface shown fractal behaviour under non-selective etching conditions. The morphological surface study was carried out using digital image processing of scanning electron microscope data. The surface patterns were segmented by the so called grade of membership method. Fractal properties were estabilished using the box counting method.
引用
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页码：207 / +
页数：2
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