Metal oxide gas sensor array for air qualitiy monitoring

被引：1
|
作者：
Wöllenstein, J [1 ]
Böttner, H [1 ]
机构：
[1] Fraunhofer Inst Phys Messtech, D-79110 Freiburg, Germany
来源：
TECHNISCHES MESSEN | 2004年 / 71卷 / 05期
关键词：
metal oxide gas sensors; sensor array; thin film technology; air quality control; application measurements;
D O I：
10.1524/teme.71.5.305.33121
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Two novel silicon-based sensor arrays for on-line air quality monitoring are described, the first one based on films deposited onto bulk silicon wafers and the second one a novel micromachined device for low power consumption. The micromachined version reduces the power consumption from 1.6 W to 0.26 W at 350 degreesC working temperature. The sensing elements (Cr1.8Ti0.2O3+z, ZnO, SnO2, WO3, V2O5) examined in the arrays include four different metal oxides deposited by thin film technologies. The measured responses in lab and application tests provide patterns which correlate with the air quality and are thus appropriate for an on-line air quality monitoring.
引用
收藏
页码：305 / 310
页数：6
相关论文
共 50 条
  • [41] Interface circuit for metal-oxide gas sensor
    Rüedi, PF
    Heim, P
    Mortara, A
    Franzi, E
    Oguey, H
    Arreguit, X
    PROCEEDINGS OF THE IEEE 2001 CUSTOM INTEGRATED CIRCUITS CONFERENCE, 2001, : 109 - 112
  • [42] Silicon hotplates for metal oxide gas sensor elements
    Sberveglieri, G
    Hellmich, W
    Muller, G
    MICROSYSTEM TECHNOLOGIES, 1997, 3 (04) : 183 - 190
  • [43] Metal oxide-based gas sensor array for VOCs determination in complex mixtures using machine learning
    Singh, Shivam
    Sajana, S.
    Varma, Poornima
    Sreelekha, Gajje
    Adak, Chandranath
    Shukla, Rajendra P.
    Kamble, Vinayak B.
    MICROCHIMICA ACTA, 2024, 191 (04)
  • [44] Differentiation of cumin seeds using a metal-oxide based gas sensor array in tandem with chemometric tools
    Ghasemi-Varnamkhasti, Mandi
    Amiri, Zahra Safari
    Tohidi, Mojtaba
    Dowlati, Majid
    Mohtasebi, Seyed Saeid
    Silva, Adenilton C.
    Fernandes, David D. S.
    Araujo, Mario C. U.
    TALANTA, 2018, 176 : 221 - 226
  • [45] Metal oxide-based gas sensor array for VOCs determination in complex mixtures using machine learning
    Shivam Singh
    Sajana S
    Poornima Varma
    Gajje Sreelekha
    Chandranath Adak
    Rajendra P. Shukla
    Vinayak B. Kamble
    Microchimica Acta, 2024, 191
  • [46] Rapid evaluation of H2S/NO2 concentration with a metal oxide gas sensor array
    Helli, O
    Lfakir, A
    Siadat, M
    Lumbreras, M
    PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2, 2003, : 1320 - 1324
  • [47] Highly Sensitive p plus n Metal Oxide Sensor Array for Low-Concentration Gas Detection
    Luo, Jianghua
    Jiang, Yishan
    Xiao, Feng
    Zhao, Xin
    Xie, Zheng
    SENSORS, 2018, 18 (08)
  • [48] Approach for quantification of metal oxide type semiconductor gas sensors used for ambient air quality monitoring
    Masson, N.
    Piedrahita, R.
    Hannigan, M.
    SENSORS AND ACTUATORS B-CHEMICAL, 2015, 208 : 339 - 345
  • [49] Miniaturized ceramic platform for metal oxide gas sensors array
    Samotaev, N. N.
    1ST INTERNATIONAL TELECOMMUNICATION CONFERENCE ADVANCED MICRO- AND NANOELECTRONIC SYSTEMS AND TECHNOLOGIES, 2016, 151
  • [50] Drift invariant gas recognition technique for on chip tin oxide gas sensor array
    Flitti, F.
    Far, A.
    Guo, B.
    Bermak, A.
    DELTA 2008: FOURTH IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONIC DESIGN, TEST AND APPLICATIONS, PROCEEDINGS, 2008, : 421 - 424
12345