Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen

被引：3
|
作者：
Mohr, Sebastian [1 ]
Schuengel, Edmund [2 ]
Schulze, Julian [2 ]
Czarnetzki, Uwe [1 ]
机构：
[1] Ruhr Univ Bochum, Inst Plasma & Atom Phys, D-44801 Bochum, Germany
[2] W Virginia Univ, Dept Phys, Morgantown, WV 26508 USA
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2014年 / 42卷 / 10期
关键词：
Plasma simulation; plasma sheaths;
D O I：
10.1109/TPS.2014.2341112
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Electrically asymmetric capacitively coupled radio-frequency discharges are known to give control over the ion distribution functions and the mean ion energy at the electrodes. So far, distribution functions of heavy ions such as argon have been measured and calculated. Hydrogen ions are able to follow the time-dependent electric field to a greater extent due to their low mass. This leads to unique structures in the distribution functions in case of collisional sheaths. Images of these ion distribution functions are presented.
引用
收藏
页码：2376 / 2377
页数：2
相关论文
共 50 条
  • [21] A novel capacitively coupled plasma driven by hollow cathode radio-frequency discharges
    Xiao, Xijian
    Wu, Jidun
    Cao, Qilu
    Huang, Xiaojiang
    PHYSICA SCRIPTA, 2023, 98 (03)
  • [22] Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge
    O'Connell, D.
    Zorat, R.
    Ellingboe, A. R.
    Turner, M. M.
    PHYSICS OF PLASMAS, 2007, 14 (10)
  • [23] Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring
    Lafleur, T.
    Delattre, P. A.
    Johnson, E. V.
    Booth, J. P.
    APPLIED PHYSICS LETTERS, 2012, 101 (12)
  • [24] Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures
    Schulze, J.
    Heil, B. G.
    Luggenholscher, D.
    Mussenbrock, T.
    Brinkmann, R. P.
    Czarnetzki, U.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2008, 41 (04)
  • [25] Electron dynamics during the reignition of pulsed capacitively-coupled radio-frequency discharges
    Hernandez, Keith
    Overzet, Lawrence J.
    Goeckner, Matthew J.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2020, 38 (03):
  • [26] Charge dynamics in capacitively coupled radio frequency discharges
    Schulze, J.
    Schuengel, E.
    Donko, Z.
    Czarnetzki, U.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (22)
  • [27] Recent developments of capacitively coupled radio-frequency excited ion gas lasers
    Mizeraczyk, J
    Mentel, J
    Sabotinov, N
    NINTH INTERNATIONAL SCHOOL ON QUANTUM ELECTRONICS: LASERS-PHYSICS AND APPLICATIONS, 1996, 3052 : 17 - 22
  • [28] A Simple Model for Ion Flux-Energy Distribution Functions in Capacitively Coupled Radio-Frequency Plasmas Driven by Arbitrary Voltage Waveforms
    Schungel, Edmund
    Donko, Zoltan
    Schulze, Julian
    PLASMA PROCESSES AND POLYMERS, 2017, 14 (4-5)
  • [29] THE EFFICIENCY OF THE ELECTRON SHEATH HEATING IN CAPACITIVELY COUPLED RADIO-FREQUENCY DISCHARGES IN THE WEAKLY COLLISIONAL REGIME
    BUDDEMEIER, U
    KORTSHAGEN, U
    PUKROPSKI, I
    APPLIED PHYSICS LETTERS, 1995, 67 (02) : 191 - 193
  • [30] Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas
    Gans, T.
    Schulze, J.
    O'Connell, D.
    Czarnetzki, U.
    Faulkner, R.
    Ellingboe, A. R.
    Turner, M. M.
    APPLIED PHYSICS LETTERS, 2006, 89 (26)
12345