Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen

Electrically asymmetric capacitively coupled radio-frequency discharges are known to give control over the ion distribution functions and the mean ion energy at the electrodes. So far, distribution functions of heavy ions such as argon have been measured and calculated. Hydrogen ions are able to follow the time-dependent electric field to a greater extent due to their low mass. This leads to unique structures in the distribution functions in case of collisional sheaths. Images of these ion distribution functions are presented.