Effect of STO seeding on PZT films crystallization

被引：3
|
作者：
Defay, Emmanuel
Wolozan, David
Andre, Bernard
机构：
[1] CEA, LETI, DRT, Silicon Heterogeneous Integrat Div, F-38054 Grenoble, France
[2] CEA, Opt Div, LETI, DRT, F-38054 Grenoble, France
来源：
INTEGRATED FERROELECTRICS | 2006年 / 80卷 / 01期
关键词：
crystallization; PZT; seeding layer; grain size;
D O I：
10.1080/10584580600656635
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study investigates the influence of a STO seeding layer on the crystallization of PZT thin films. It is shown that a reduction in crystallization temperature higher than 100 degrees C can be achieved. STO layers less than 3 nm-thick induce a strong (111) orientation of PZT as observed with TiO2 seeding. This explains the increase of the remnant polarization of the seeded layers. Besides, STO seeding induces a reduction of the grain size.
引用
收藏
页码：115 / 124
页数：10
相关论文
共 50 条
  • [31] Effects of crystallization conditions on dielectric and ferroelectric properties of PZT thin films
    Araújo, EB
    Eiras, JA
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2003, 36 (16) : 2010 - 2013
  • [32] Anomalous losses of lead in crystallization of the perovskite phase in thin PZT films
    Pronin, V. P.
    Senkevich, S. V.
    Kaptelov, E. Yu.
    Pronin, I. P.
    PHYSICS OF THE SOLID STATE, 2013, 55 (01) : 105 - 108
  • [33] Bottom electrode crystallization of PZT thin films deposited by laser ablation
    Mardare, AI
    Mardare, CC
    Pinheiro, E
    Joanni, E
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (4A): : 1527 - 1531
  • [34] Effects of crystallization conditions on dielectric and ferroelectric properties of PZT thin films
    Araújo, E.B.
    Eiras, J.A.
    Journal of Physics D: Applied Physics, 2003, 36 (16): : 2010 - 2013
  • [35] Seeding acceleration of perovskite crystallization in lead calcium titanate thin films
    Shen, H
    Cheng, JJ
    Chen, GR
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1997, 220 (2-3) : 231 - 234
  • [36] Seeding Solid Phase Crystallization of Amorphous Silicon Films with Embedded Nanocrystals
    Anderson, Curtis
    Kortshagen, Uwe
    AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008, 2008, 1066 : 185 - 190
  • [37] Seeding Crystallization in Time
    Hajdusek, Michal
    Solanki, Parvinder
    Fazio, Rosario
    Vinjanampathy, Sai
    PHYSICAL REVIEW LETTERS, 2022, 128 (08)
  • [38] Effect of pH on the crystallization of homogeneously precipitated nanosized PZT powder
    Roy, S.
    Bysakh, S.
    Subrahmanyam, J.
    MATERIALS AND MANUFACTURING PROCESSES, 2007, 22 (04) : 457 - 461
  • [39] Effect of thickness of PZT thin films on the structural and dielectric properties of BMT/PZT multilayered thin films
    Lv, Chun
    Wu, Zhi
    Zhou, Jing
    Shen, Jie
    Chen, Wen
    Gongneng Cailiao/Journal of Functional Materials, 2014, 45 (24): : 24115 - 24118
  • [40] Processing and seeding effects on crystallisation of PZT thin films from sol-gel method
    Wu, AY
    Salvado, IMM
    Vilarinho, PM
    Baptista, JL
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1997, 17 (12) : 1443 - 1452
12345