共 50 条
- [36] Surface roughness evaluation of electrochemical mechanical polishing (ECMP) Advanced Metallization Conference 2006 (AMC 2006), 2007, : 565 - 570
- [38] Prediction of Surface Roughness in Chemical Mechanical Polishing of FeCrAl Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2023, 59 (23): : 310 - 319