Investigation on picosecond laser-induced damage in HfO2/SiO2 high-reflective coatings

被引:16
|
作者
Li, Cheng [1 ,2 ]
Zhao, Yuan'an [1 ,4 ]
Cui, Yun [1 ]
Wang, Yueliang [1 ,2 ]
Peng, Xiaocong [1 ,2 ]
Shan, Chong [1 ,3 ]
Zhu, Meiping [1 ]
Wang, Jianguo [1 ]
Shao, Jianda [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Lab Thin Film Opt, Shanghai 201800, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Changchun Univ Sci & Technol, Changchun 130022, Jilin, Peoples R China
[4] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Beijing, Peoples R China
来源
关键词
High-reflective coating; Laser-induced damage; Protective layer; Picosecond pulse; Electric field distribution; INDUCED BREAKDOWN; SIO2; NM;
D O I
10.1016/j.optlastec.2018.04.028
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We investigate the influence of a protective layer on the picosecond laser-induced damage in HfO2/SiO2 high-reflective (HR) coatings. Two types of 1064-nm HR coatings, with and without a SiO2 protective layer, are deposited using electron beam evaporation. Laser-induced damage tests are operated with 1064-nm, 30-ps laser pulses in one-on-one mode. Five different angles of incidence (AOIs) are considered in the tests for both coatings, in order to modulate the electric field (E-field) intensity in the HR coatings. The damage morphologies and cross-sections of the damage sites are characterized using scanning electron microscope (SEM) and focused ion beam (FIB), respectively. Experimental results show that the SiO2 protective layer slightly improves the laser-induced damage threshold (LIDT) of the HR coatings for all AOI values. The damage morphology contains high-density micrometer-scale pits and layer delaminations, at low and high fluences, respectively. The cross-sections of the damage sites and LLDTs for different AOIs are compared with corresponding E-field distributions. For both coatings, the damage is initiated near the peak of the E-field. A negative linear relationship is observed between the LIDT and corresponding maximum E-field intensity for both coatings. (C) 2018 Elsevier Ltd. All rights reserved.
引用
收藏
页码:372 / 377
页数:6
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