Laser-induced damage morphology of high-reflective optical coatings

被引：21
|
作者：
He, HB
Hu, HY
Tang, ZP
Fan, ZX
Shao, HD
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, R&D Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China
[2] Agilent Technol Shanghai Co Ltd, Shanghai 200020, Peoples R China
[3] Univ Sci & Technol China, Hefei 230026, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2005年 / 241卷 / 3-4期
关键词：
high-reflective coating; laser-induced damage threshold; temperature field; discrete meso-element method;
D O I：
10.1016/j.apsusc.2004.07.045
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Two different kinds of 1064 nm high-reflective (HR) coatings, with and without SiO2 protective layer, were prepared by electron beam evaporation. Three-dimensional damage morphology, caused by a Nd:YAG pulsed laser, was investigated for these HR coatings. Development of laser-induced damage on HR coatings was revealed by both temperature field calculation and discrete meso-element simulation. Theoretical results met experimental very well. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：442 / 448
页数：7
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