Patterning Highly Conducting Conjugated Polymer Electrodes for Soft and Flexible Microelectrochemical Devices

被引:13
|
作者
Khaldi, Alexandre [1 ,2 ]
Falk, Daniel [1 ]
Bengtsson, Katarina [1 ]
Maziz, Ali [1 ,3 ]
Filippini, Daniel [1 ]
Robinson, Nathaniel D. [1 ]
Jager, Edwin W. H. [1 ]
机构
[1] Linkoping Univ, Dept Phys Chem & Biol, S-58183 Linkoping, Sweden
[2] IMT Atlantique Bretagne Pays Loire, Campus Brest,Technopole Brest Iroise,CS 83818, F-29238 Brest 03, France
[3] LAAS, 7 Ave Colonel Roche,BP 54200, F-31031 Toulouse 4, France
基金
瑞典研究理事会;
关键词
vapor-phase polymerization; printing soft lithography; conjugated polymer actuators; patterning; microfabrication; ACTUATORS; MICROACTUATORS; MICROFABRICATION; POLYPYRROLE;
D O I
10.1021/acsami.8b01059
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
There is a need for soft actuators in various biomedical applications to manipulate delicate objects such as cells and tissues. Soft actuators are able to adapt to any shape and limit the stress applied to delicate objects. Conjugated polymer (CP) actuators, especially in the so-called trilayer configuration, are interesting candidates for driving such micromanipulators. However, challenges involved in patterning the electrodes in a trilayer with individual contact have prevented further development of soft micromanipulators based on CP actuators. To allow such patterning, two printing-based patterning techniques have been developed. First, an oxidant layer is printed using either syringe-based printing or microcontact printing, followed by vapor-phase polymerization of the CP. Submillimeter patterns with electronic conductivities of 800 S.cm(-1) are obtained. Next, laser ablation is used to cleanly cut the final device structures including the printed patterns, resulting in fingers with individually controllable digits and miniaturized hands. The methods presented in this paper will enable integration of patterned electrically active CP layers in many types of complex three-dimensional structures.
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页码:14978 / 14985
页数:8
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