MEMS-Enabled Smart Autonomous Systems

被引：0
|
作者：
Van Hoof, Chris [1 ]
机构：
[1] IMEC, Louvain, Belgium
来源：
DTIP 2008: SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS | 2008年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A smart environment will be enabled by miniaturized sensor systems. MEMS technology is providing both sensing and actuating solutions and energy scavenging solutions. State-of-the-art and IMEC solutions will be presented.
引用
收藏
页码：373 / 373
页数：1
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