Thin-film-silicon position sensors made using laser scribing

被引：0

作者：

Urbina, L. ^{[1
]}

Gandia, J. J. ^{[1
]}

Carabe, J. ^{[1
]}

Lauzurica, S. ^{[2
]}

Molpeceres, C. ^{[2
]}

Ocana, J. L. ^{[2
]}

机构：

[1] CIEMAT, Avda Complutense 22, E-28770 Madrid, Spain

[2] Univ Politecn Madrid, Ctr Laser, Madrid, Spain

来源：

OPTICAL SENSING II | 2006年 / 6189卷

关键词：

thin-film silicon; position sensors; laser scribing;

D O I：

10.1117/12.662685

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Position detectors are useful for alignment and orientation sensing. Charge-coupled devices (CCDs) are used in small-area systems. Four-quadrant diodes are a low-cost, limited-accuracy alternative. In cases where either large area or reliability under harsh conditions are required, thin-film-silicon sensors may become the only reasonable choice. The paper proposes a simple structure for making such devices, describes the first experiments and discusses the key issues faced, with emphasis on laser scribing.

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页数：8

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