Thin-film-silicon position sensors made using laser scribing

被引:0
|
作者
Urbina, L. [1 ]
Gandia, J. J. [1 ]
Carabe, J. [1 ]
Lauzurica, S. [2 ]
Molpeceres, C. [2 ]
Ocana, J. L. [2 ]
机构
[1] CIEMAT, Avda Complutense 22, E-28770 Madrid, Spain
[2] Univ Politecn Madrid, Ctr Laser, Madrid, Spain
来源
OPTICAL SENSING II | 2006年 / 6189卷
关键词
thin-film silicon; position sensors; laser scribing;
D O I
10.1117/12.662685
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Position detectors are useful for alignment and orientation sensing. Charge-coupled devices (CCDs) are used in small-area systems. Four-quadrant diodes are a low-cost, limited-accuracy alternative. In cases where either large area or reliability under harsh conditions are required, thin-film-silicon sensors may become the only reasonable choice. The paper proposes a simple structure for making such devices, describes the first experiments and discusses the key issues faced, with emphasis on laser scribing.
引用
收藏
页数:8
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