A Digital Calibration Method for a MEMS Accelerometer based on Harmonic Self-Test

被引：0

作者：

Chen, Dongliang ^{[1
,2
]}

Liu, Xiaowei ^{[1
,2
,3
]}

Yin, Liang ^{[1
,2
]}

QiangFu ^{[1
,2
]}

机构：

[1] Harbin Inst Technol, MEMS Ctr, Harbin, Heilongjiang, Peoples R China

[2] Harbin Inst Technol, Key Lab Microsyst & Microstruct, Minist Educ, Harbin, Heilongjiang, Peoples R China

[3] Harbin Inst Technol, State Key Lab Urban Water Resource & Environm, Harbin 150001, Peoples R China

来源：

21ST ANNUAL CONFERENCE AND 10TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY | 2020年 / 1520卷

关键词：

MODULATION;

D O I：

10.1088/1742-6596/1520/1/012008

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper proposes a digital calibration method for electromechanical closed-loop MEMS accelerometer. The method based on a harmonic self-test mechanism, in which the MEMS structure is excited by an on-chip generated electrostatic force and the corresponding harmonic distortion could be captured and analysed as an indicator of structure mismatch. According the harmonic distortion level, the mismatch could be calibrated out by the electrical signal on-chip. The whole exciting and calibrating procedure is realized in digital domain. Thus, not only the area and power consumption are reduced, but also the flexibility and robustness of the procedure is enhanced.

引用

页数：8

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