Design and microfabrication of Terahertz magnetic metamaterials

被引:0
|
作者
Yen, TJ [1 ]
Fang, N [1 ]
Zhang, X [1 ]
机构
[1] Univ Calif Los Angeles, Dept Mech & Aerosp Engn, Los Angeles, CA 90024 USA
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we introduce the simulation design and microfabrication of a class of magnetic metamaterials with critical dimension of 2-6 microns and lattice constant of 30-50 microns. These metamaterials will exhibit magnetic response at 0.5-2THz. To optimize the design variables, we conducted a series of Taguchi experiments and a quasi-linear relationship of resonant frequency is established upon each design parameter. We are currently characterizing the first generation of the fabricated magnetic metamaterials using Fourier Transformed Infrared spectroscopy.
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页码:37 / 40
页数:4
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