Novel zinc oxide nanostructured thin films for volatile organic compaunds gas sensors

被引：0
|
作者：
Shishiyanu, T. [1 ]
Shishiyanu, S. [1 ]
Lupan, O. [1 ]
Ontea, V. [1 ]
Bragorenco, A. [1 ]
机构：
[1] Tech Univ Moldova, Dept Microelect & Semicond Devices, MD-2004\ Kishinev, Moldova
来源：
2006 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2 | 2007年
关键词：
RPP; sensors; VOC; ZnO nanostructure;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Novel zinc oxide nanostructured thin films have been obtained by chemical deposition technique and Rapid Photothermal Processing (RPP). ZnO nanostructures were studied for the development of volatile organic compounds (VOC) sensors. The investigations results indicate that by RPP is possible to control the sensing properties and operating temperature. A correlation taking into account the nanostructure Of the material, the effects of the dopants, RPP and the response of the VOC sensor was established.
引用
收藏
页码：201 / +
页数：2
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