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- [4] Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications [J]. SMART SENSORS, ACTUATORS, AND MEMS IV, 2009, 7362
- [10] Apatite Coatings Deposited by DC Magnetron Sputtering [J]. SOLID OXIDE FUEL CELLS 12 (SOFC XII), 2011, 35 (01): : 1275 - 1282