Electrical characterization of Cu Schottky contacts to n-type GaAsN grown on (311)A/B GaAs substrates

被引:5
|
作者
Dong, Chen [1 ,2 ]
Han, Xiuxun [1 ,3 ]
Gao, Xin [4 ]
Ohshita, Yoshio [5 ]
Yamaguchi, Masafumi [5 ]
机构
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, Lab Clean Energy Chem & Mat, Lanzhou 730000, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100080, Peoples R China
[3] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[4] Lanzhou Inst Phys, Sci & Technol Vacuum Technol & Phys Lab, Lanzhou 730000, Peoples R China
[5] Toyota Technol Inst, Tempaku Ku, Nagoya, Aichi 4688511, Japan
基金
中国国家自然科学基金;
关键词
GaAsN; Schottky diode; Growth orientation; I-V characteristics; C-V characteristics; Electrical properties; BARRIER HEIGHT; CHEMISTRY; GAINNAS; DENSITY;
D O I
10.1016/j.jallcom.2015.10.097
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The contact behavior of Cu on n-type GaAsN, grown on (100) and (311) A/B GaAs substrates by chemical beam epitaxy, has been investigated by currentevoltage (I-V) and capacitanceevoltage (C-V) measurements. Both N incorporation and growth orientation are found to influence the electrical properties of Cu/GaAsN Schottky diodes. The increasing N composition leads to an increase in the ideality factor and Schottky barrier height (C-V), whereas a decrease in the carrier concentration in samples with all adopted growth orientations. Compared with (100) and (311)B samples, the Schottky diodes constructed on (311)A GaAsN epilayer exhibit better performance with ideality factor close to 1 and higher barrier height. The interfacial chemical reaction between metal layer and surface atoms on the growth surface is believed to account for the observations. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:325 / 329
页数:5
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