Analysis of various approaches for the fabrication of diffractive Optical Elements

被引:0
|
作者
Bourgade, Antoine [1 ]
Le Mein, Julien [2 ]
Pigeon, Yoran-Eli [2 ]
Heggarty, Kevin [2 ]
Begou, Thomas [1 ]
Lumeau, Julien [1 ]
机构
[1] Aix Marseille Univ, Inst Fresnel, Cent Marseille, CNRS, Marseille, France
[2] Inst Mines Telecom, Opt Dept, Telecom Bretagne, CS83818, F-29238 Brest 03, France
关键词
D O I
10.1109/cleoe-eqec.2019.8872891
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页数:1
相关论文
共 50 条
  • [1] Efficiency analysis of periodic diffractive optical elements - Suitability of various approaches
    Levy, U
    Marom, E
    Mendlovic, D
    ROMOPTO 2000: SIXTH CONFERENCE ON OPTICS, 2000, 4430 : 891 - 897
  • [2] Analysis of the fabrication of diffractive optical elements in photopolymers
    Gallego, S.
    Marquez, A.
    Fernandez, R.
    Piera, A.
    Martinez, F. J.
    Ortuno, M.
    Frances, J.
    Belendez, A.
    Pascual, I.
    OPTICS AND PHOTONICS FOR INFORMATION PROCESSING VII, 2013, 8855
  • [3] Analysis of multimask fabrication errors for diffractive optical elements
    Caley, Adam J.
    Braun, Markus
    Waddie, Andrew J.
    Taghizadeh, Mohammad R.
    APPLIED OPTICS, 2007, 46 (12) : 2180 - 2188
  • [4] Fabrication and application of diffractive optical elements
    Poleshchuk, A. G.
    6TH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2010, 7544
  • [5] Design and fabrication of diffractive optical elements
    Taghizadeh, MR
    Blair, P
    Layet, B
    Barton, IM
    Waddie, AJ
    Ross, N
    MICROELECTRONIC ENGINEERING, 1997, 34 (3-4) : 219 - 242
  • [6] Design and fabrication of diffractive optical elements
    Heriot-Watt Univ, Edinburgh, United Kingdom
    Microelectron Eng, 3-4 (219-242):
  • [7] Diffractive optical elements: fabrication and application
    Poleshchuk, A. G.
    Korolkov, V. P.
    Nasyrov, R. K.
    7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014, 9283
  • [8] Design and fabrication of diffractive optical elements
    Kusko, M
    Cojoc, D
    Apostol, D
    Muller, R
    Manea, E
    Podaru, C
    2003 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2003, : 167 - 170
  • [9] Investigating fabrication errors for diffractive optical elements
    Caley, Adam J.
    Braun, Markus
    Waddie, Andrew J.
    Taghizadeh, Mohammed R.
    MICRO-OPTICS, VCSELS, AND PHOTONIC INTERCONNECTS II: FABRICATION, PACKAGING, AND INTEGRATION, 2006, 6185
  • [10] Excimer laser fabrication of diffractive optical elements
    Winfield, RJ
    Meister, M
    Crean, GM
    Paineau, S
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2000, 3 (5-6) : 481 - 486