Low cost thermal flow sensor for home-appliances applications

被引：3
|
作者：
Sabaté, N [1 ]
Gràcia, I [1 ]
Cané, C [1 ]
Berganzo, J [1 ]
Puicorbé, J [1 ]
Morante, JR [1 ]
机构：
[1] CSIC, CNM, E-08193 Barcelona, Spain
来源：
DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002 | 2002年 / 4755卷
关键词：
flow gas sensor; silicon micromachining; thermal sensor;
D O I：
10.1117/12.462855
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A gas flow sensor has been developed for home-appliances applications. The main requirements were to obtain a low cost single device able to work in the range 0-1slm with high linearity, low power, reliability and robustness. A thermal flow sensor has been designed with the help of thermal and flow FEM simulation for the design of the sensor chip as well as its packaging. The process flow is based on a simple silicon micromachined technology. Chip-on-board solution has been selected to simplify the packaging. Electronics for driving the sensor and for compensating offsets and temperature dependence and for linearising the output signal has been implemented. Final device shows good sensitivity and linearity in different zones of the range of interest.
引用
收藏
页码：549 / 555
页数：7
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