HIGH FREQUENCY CHARACTERISATION OF SINGLE INAS NANOWIRE FIELD-EFFECT TRANSISTORS

被引:0
|
作者
Blekker, K. [1 ]
Do, Q. T. [1 ]
Matiss, A. [1 ]
Prost, W. [1 ]
Tegude, F. J. [1 ]
机构
[1] Univ Duisburg Essen, CeNIDE, Dept Solid State Elect, Duisburg, Germany
关键词
InAs nanowire field-effect transistor; Magnesium Oxide gate dielectric; high frequency characterisation;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on a first RF characterisation of single InAs nanowire channel field-effect-transistors. The nanowires with about 30 nm diameter are transferred to a carrier substrate and contacted with a coplanar waveguide pad configuration with a pitch down to 50 Am. Magnesium Oxide as well as SiN(x) are used as gate dielectric for high performance MISFET type field-effect-transistors. Small signal scattering parameter measurements have been performed on-wafer. The nanowire FET exhibit an ultra-small intrinsic gate-source capacitance C(gs) down to a few hundred ato Farad, making a careful de-embedding of the data indispensable. First measurements have shown a maximum stable gain higher than 30 dB at low frequency and a maximum oscillation frequency of 15 GHz.
引用
收藏
页码:398 / 400
页数:3
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