Pulsed laser deposition and characterization of ZrO2-Al2O3 films

被引：7
|
作者：
Qadri, SB
Horwitz, JS
Chrisey, DB
Donovan, EP
Skelton, EF
机构：
[1] US Naval Research Laboratory, Washington
来源：
SURFACE & COATINGS TECHNOLOGY | 1996年 / 86卷 / 1-3期
关键词：
pulsed laser deposition; zirconia coating; tetragonal phase; high temperature corrosion; optical coatings;
D O I：
10.1016/S0257-8972(96)03003-4
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Thin films of ZrO2-Al2O3 have been produced by pulsed laser deposition from targets that were mixtures of ZrO2 and Al2O3 with a pre-selected composition. The chemical composition of the film was the same as that of the target as determined by Rutherford back scattering (RBS). As deposited, the films were amorphous. Annealing the films at 1000 degrees C for 24 h in air resulted in the formation of a tetragonal phase of zirconia as determined by X-ray diffraction.
引用
收藏
页码：149 / 152
页数：4
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