Machine learning control of an elliptically bent hard X-ray mirror

This article showcases the high-resolution control of an elliptically bent hard X-ray mirror optics at the Advanced Photon Source. The mirror uses a compact laminar flexure bending mechanism to achieve elliptical shapes covering a large range of focal distances. An array of capacitive sensors are used as a surface profiler for in-situ monitoring of the mirror shape. Machine learning and control techniques were used to change the mirror shape and focus the incident X-ray at predefined focal planes. The mirror surface shape error can be controlled to be within 40 nm rms with high repeatability. This technique gives the capability to focus incident X-ray beam within a range of focal distances corresponding to shape deformation range of a mirror optics. This work would be beneficial for controlling similar adaptive optics for multiple adaptive optics systems.