Analysis and Control of a Micromanipulation Stage Based on Electromagnetic Levitation

A novel long-range five-degree of freedom micro manipulation stage based on electromagnetic levitation is presented according to synchronous tracking of magnetic fields when the stage moves. Fields solution of Halbach magnets and wires arrays were derived with Fourier series method, we analysis the fields and interacting force of the two-dimension magnet arrays and wires arrays according to the fields superimpose principle, and the drive equation of motion in vertical and lateral direction is derived from the small perturbation method. Simulations for the fields and interacting forces show the validity of the analysis of fields and forces. Experiments with the method of Puzzy-PID control was performed, it shows that this stage can realize high precision positioning.