Fabrication and microstructure of the dc-magnetron-sputtered YBa2Cu3O7-x superconducting thin films

Systematic investigations were conducted to determine the effect of deposition conditions on the microstructure and superconducting properties of YBa2Cu3O7-x thin films produced by d.c. magnetron sputtering on (001) MgO substrate. The films were c-axis preferentially oriented with respect to the (001) MgO surface at substrate temperatures of 680-700 degrees C. X-ray diffraction patterns clearly indicated the existence of the c-axis alignment normal to the substrate surface and some second phases. The second phases, including a Cu-rich phase and Y2O3, were identified by energy dispersive X-ray spectrometer and the microstructures were analysed by electron and;atomic force microscopes.