Image conservation in inelastically scattered electrons in reflection electron microscopy

被引:6
|
作者
Tanishiro, Y
Okamoto, K
Suzuki, T
Ishiguro, N
Mimoda, H
Miura, H
Yagi, K
Takeguchi, M
机构
[1] Tokyo Inst Technol, Dept Phys, Tokyo 1528551, Japan
[2] JEOL Ltd, Akishima, Tokyo 1968558, Japan
[3] NRIM, Refined Beam Res Unit, Tsukuba, Ibaraki 3050003, Japan
关键词
image conservation; REM; energy filter; EELS; surface plasmon; lattice fringe;
D O I
10.1143/JJAP.38.6540
中图分类号
O59 [应用物理学];
学科分类号
摘要
Energy-filtered reflection electron microscope (REM) images of well-defined surfaces were taken for the first time using an ultrahigh vacuum electron microscope equipped with an omega filter. Si(1 1 1)7 x 7 and Si(1 1 1)5 x 2-Au surfaces were imaged. Images using electrons with energy losses of 11.3 and 22.6 eV (single and double surface plasmon excitation) showed lattice fringes of Si(1 1 1)7 x 7(2.3 nm in spacing) and Si(1 1 1)5 x 2-Au(1.7 nm). The observation gave the first experimental evidence that diffraction image contrast is conserved in images formed by electrons inelastically scattered by small angles in REM; as in the case of transmission electron microscopy.
引用
收藏
页码:6540 / 6543
页数:4
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