Design and Fabrication of Chirped Mirror

被引：3

作者：

Wang Yan-Zhi ^{[1
,2
]}

Shao Jian-Da ^{[1
]}

Dong Hong-Cheng ^{[1
,2
]}

Zhang Wei-Li ^{[1
]}

Cui Yun ^{[1
]}

He Hong-Bo ^{[1
]}

Fan Zheng-Xiu ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 10039, Peoples R China

来源：

CHINESE PHYSICS LETTERS | 2009年 / 26卷 / 09期

关键词：

Sputtering;

D O I：

10.1088/0256-307X/26/9/094209

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Chirped mirrors (CMs) are designed and manufactured. The optimized CM provides a group delay dispersion (GDD) of around -60 fs(2) and average reflectivity of 99.4% with bandwidth 200 nm at a central wavelength of 800 nm. The CM structure consists of 52 layers of alternating high refractive index Ta2O5 and low refractive index SiO2. Measurement results show that the control of CM manufacturing accuracy can meet our requirement through time control with ion beam sputtering. Because the GDD of CMs is highly sensitive to small discrepancies between the layer thickness of calculated design and those of the manufactured mirror, we analyze the error sources which result in thickness errors and refractive index inhomogeneities in film manufacture.

引用

页数：4

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