GHz femtosecond ablation: efficiency and quality aspects

被引：0
|
作者：
Bonamis, G. [1 ,2 ]
Mishchik, K. [1 ]
Audouard, E. [1 ]
Mottay, E. [1 ]
Hoenninger, C. [1 ]
Lopez, J. [2 ]
Manek-Hoenninger, I [2 ]
机构：
[1] Amplitude Syst, Pessac, France
[2] Univ Bordeaux, CNRS, CEA, CELIA UMR5107, F-33405 Talence, France
来源：
2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2020年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
GHz femtosecond ablation results in high specific removal rates. The efficiency increase can be explained by combined non-thermal and thermal contributions in the laser-matter interaction. We study the impact of the efficiency gain on the obtained processing quality. (C) 2020 The Author(s)
引用
收藏
页数：2
相关论文
共 50 条
  • [21] Efficient ablation of silicon with high power GHz femtosecond laser source.
    Mottay, E.
    Bonamis, G.
    Mishchik, K.
    Lopez, J.
    Audouard, E.
    Honninger, C.
    Manek-Honninger, I.
    2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2019,
  • [22] New aspects of femtosecond laser ablation of Si in water: a material perspective
    Kumar, Kanaka Ravi
    Banerjee, Dipanjan
    Akkanaboina, Mangababu
    Goud, R. Sai Prasad
    Anjum, Arshiya
    Prakash, A. P. Gnana
    Pathak, Anand P.
    Soma, Venugopal Rao
    Rao, S. V. S. Nageswara
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2024, 36 (23)
  • [23] Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon
    X. Zeng
    X.L. Mao
    R. Greif
    R.E. Russo
    Applied Physics A, 2005, 80 : 237 - 241
  • [24] Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon
    Zeng, X
    Mao, XL
    Greif, R
    Russo, RE
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (02): : 237 - 241
  • [25] Femtosecond and picosecond laser microablation:: ablation efficiency and laser microplasma expansion
    Sallé, B
    Gobert, O
    Meynadier, P
    Perdrix, M
    Petite, G
    Semerok, A
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1): : S381 - S383
  • [26] A Study on Ablation Quality of Silicon by Femtosecond Laser Pulse Trains
    Chen Tianqi
    Yang Jian
    Jia Tianqing
    ACTA PHOTONICA SINICA, 2021, 50 (06)
  • [27] Femtosecond and picosecond laser microablation: ablation efficiency and laser microplasma expansion
    B. Sallé
    O. Gobert
    P. Meynadier
    M. Perdrix
    G. Petite
    A. Semerok
    Applied Physics A, 1999, 69 : S381 - S383
  • [28] Analysis of surface quality for femtosecond laser ablation silica glass
    Wu, Dongjiang
    Yao, Longyuan
    Ma, Guangyi
    Niu, Fangyong
    Guo, Dongming
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2014, 50 (23): : 194 - 199
  • [29] Nonlinear enhancement of femtosecond laser ablation efficiency by hybridization with nanosecond laser
    Yahng, J. S.
    Chon, B. H.
    Kim, C. H.
    Jeoung, S. C.
    Kim, H. R.
    OPTICS EXPRESS, 2006, 14 (20): : 9544 - 9550
  • [30] Laser ablation efficiency of pure metals with femtosecond, picosecond and nanosecond pulses
    Semerok, A
    Chaleard, C
    Detalle, V
    Kocon, S
    Lacour, JL
    Mauchien, P
    Meynadier, P
    Nouvellon, C
    Palianov, P
    Perdrix, M
    Petite, G
    Salle, B
    HIGH-POWER LASER ABLATION, PTS 1-2, 1998, 3343 : 1049 - 1055
12345