GHz femtosecond ablation: efficiency and quality aspects

被引：0
|
作者：
Bonamis, G. [1 ,2 ]
Mishchik, K. [1 ]
Audouard, E. [1 ]
Mottay, E. [1 ]
Hoenninger, C. [1 ]
Lopez, J. [2 ]
Manek-Hoenninger, I [2 ]
机构：
[1] Amplitude Syst, Pessac, France
[2] Univ Bordeaux, CNRS, CEA, CELIA UMR5107, F-33405 Talence, France
来源：
2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2020年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
GHz femtosecond ablation results in high specific removal rates. The efficiency increase can be explained by combined non-thermal and thermal contributions in the laser-matter interaction. We study the impact of the efficiency gain on the obtained processing quality. (C) 2020 The Author(s)
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页数：2
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