An acceleration sensor in CMOS-compatible technology for integration in complex systems

被引：5
|
作者：
Lang, M
Glesner, M
机构：
[1] Darmstadt University of Technology, Institute of Microelectronic Systems, D-64583 Darmstadt
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1997年 / 7卷 / 03期
关键词：
D O I：
10.1088/0960-1317/7/3/030
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The design of an acceleration sensor with an integrated amplifier in CMOS-compatible technology is described. The whole system is fabricated using a standard 1.0 mu m CMOS technology with only one additional micromachining fabrication step, avoiding bond steps or CVD of additional materials. The sensing element is based on the use of the piezoresistive effect. The outlook for the use of the acceleration sensor as a standard component for microsystems design is anticipated.
引用
收藏
页码：193 / 195
页数：3
相关论文
共 50 条
  • [21] CMOS-Compatible Optoelectronic Imagers
    Bi, Cheng
    Liu, Yanfei
    COATINGS, 2022, 12 (11)
  • [22] A Universal Bonding Strategy for Achieving CMOS-Compatible Silicon Heterogeneous Integration
    Du, Yu
    Jiang, Heng
    Zhu, Bingxuan
    Yan, Han
    Chai, Yao
    Tsoi, Chi Chung
    Zhang, Xuming
    Wang, Chenxi
    ADVANCED MATERIALS TECHNOLOGIES, 2025,
  • [23] Opportunities and integration challenges for CMOS-compatible silicon photonic and optoelectronic devices
    Salib, M
    Morse, M
    Paniccia, M
    2004 IST IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, 2004, : 1 - 3
  • [24] CMOS-compatible low stress silicon nitride films for photonic integration
    Li, Donghao
    Li, Bin
    Tang, Bo
    Xiong, Wenjuan
    Zhang, Peng
    Yang, Yan
    Liu, Ruonan
    Li, Zhihua
    NANOPHOTONICS AND MICRO/NANO OPTICS VI, 2020, 11556
  • [25] Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing
    Augel, L.
    Berkmann, F.
    Latta, D.
    Fischer, I. A.
    Bechler, S.
    Elogail, Y.
    Kostecki, K.
    Potje-Kamloth, K.
    Schulze, J.
    MICROFLUIDICS AND NANOFLUIDICS, 2017, 21 (11)
  • [26] An alternative plasmonic material-based CMOS-compatible temperature sensor
    Rahad, Rummanur
    Sobhani, Mahboob
    Emon, Jahidul Hoq
    Afrid, Sheikh Mohd Ta-Seen
    Mahadi, Mahin Khan
    Mohsin, Abu S. M.
    Faruque, Omar
    Sagor, Rakibul Hasan
    OPTICS COMMUNICATIONS, 2024, 569
  • [27] Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing
    L. Augel
    F. Berkmann
    D. Latta
    I. A. Fischer
    S. Bechler
    Y. Elogail
    K. Kostecki
    K. Potje-Kamloth
    J. Schulze
    Microfluidics and Nanofluidics, 2017, 21
  • [28] Thermally Modulated CMOS-Compatible Particle Sensor for Air Quality Monitoring
    Specht, Jan Peter
    Esfahani, Siavash
    Xing, Yuxin
    Kock, Anton
    Cole, Marina
    Gardner, Julian William
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2022, 71
  • [29] A FULLY CMOS-COMPATIBLE INFRARED-SENSOR FABRICATED ON SIMOX SUBSTRATES
    MULLER, M
    GOTTFRIEDGOTTFRIED, R
    KUCK, H
    MOKWA, W
    SENSORS AND ACTUATORS A-PHYSICAL, 1994, 42 (1-3) : 538 - 541
  • [30] Optimization of high Q CMOS-compatible microwave inductors using silicon CMOS technology
    Park, M
    Lee, S
    Yu, HK
    Nam, KS
    1997 IEEE RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC) SYMPOSIUM: DIGEST OF TECHNICAL PAPERS, 1997, : 181 - 184
12345