An acceleration sensor in CMOS-compatible technology for integration in complex systems

被引：5
|
作者：
Lang, M
Glesner, M
机构：
[1] Darmstadt University of Technology, Institute of Microelectronic Systems, D-64583 Darmstadt
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1997年 / 7卷 / 03期
关键词：
D O I：
10.1088/0960-1317/7/3/030
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The design of an acceleration sensor with an integrated amplifier in CMOS-compatible technology is described. The whole system is fabricated using a standard 1.0 mu m CMOS technology with only one additional micromachining fabrication step, avoiding bond steps or CVD of additional materials. The sensing element is based on the use of the piezoresistive effect. The outlook for the use of the acceleration sensor as a standard component for microsystems design is anticipated.
引用
收藏
页码：193 / 195
页数：3
相关论文
共 50 条
  • [1] A CMOS-compatible fluid density sensor
    Westberg, D
    Paul, O
    Andersson, G
    Baltes, H
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (03) : 253 - 255
  • [2] NOVEL FULLY CMOS-COMPATIBLE VACUUM SENSOR
    PAUL, O
    BALTES, H
    SENSORS AND ACTUATORS A-PHYSICAL, 1995, 46 (1-3) : 143 - 146
  • [3] Characterization and modeling of a CMOS-compatible MEMS technology
    Latorre, Laurent
    Nouet, Pascal
    Bertrand, Yves
    Hazard, Philippe
    Pressecq, Francis
    Sensors and Actuators, A: Physical, 1999, 74 (01): : 143 - 147
  • [4] Characterization and modeling of a CMOS-compatible MEMS technology
    Latorre, L
    Nouet, P
    Bertrand, Y
    Hazard, P
    Pressecq, F
    SENSORS AND ACTUATORS A-PHYSICAL, 1999, 74 (1-3) : 143 - 147
  • [5] CMOS-Compatible Contact Technology for Si Photonics
    Rodriguez, Philippe
    Ghegin, Elodie
    Nemouchi, Fabrice
    2018 18TH INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY (IWJT), 2018, : 41 - 46
  • [6] CMOS-COMPATIBLE INTEGRATION OF THIN FERROMAGNETIC-FILMS
    SAUER, B
    GOTTFRIEDGOTTFRIED, R
    HAASE, T
    KUCK, H
    SENSORS AND ACTUATORS A-PHYSICAL, 1994, 42 (1-3) : 582 - 584
  • [7] A CMOS-COMPATIBLE MONOLITHIC CONDUCTIVITY SENSOR WITH INTEGRATED ELECTRODES
    KORDAS, N
    MANOLI, Y
    MOKWA, W
    ROSPERT, M
    SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) : 31 - 37
  • [8] New CMOS-Compatible Mechanical Shear Stress Sensor
    Sutor, Alexander
    Lerch, Reinhard
    Hohe, Hans-Peter
    Gavesi, Marco
    IEEE SENSORS JOURNAL, 2001, 1 (04) : 345 - 351
  • [9] A CMOS-Compatible Plenoptic Sensor for Smart Lighting Applications
    Ghasemi, Javad
    Neumann, Alexander
    Nezhadbadeh, Shima
    Nie, Xiangyu
    Zarkesh-Ha, Payman
    Brueck, S. R. J.
    2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2015,
  • [10] Design and fabrication of a CMOS-compatible MHP gas sensor
    Li, Ying
    Yu, Jun
    Wu, Hao
    Tang, Zhenan
    AIP ADVANCES, 2014, 4 (03)
12345